JPS63183264U - - Google Patents
Info
- Publication number
- JPS63183264U JPS63183264U JP7240887U JP7240887U JPS63183264U JP S63183264 U JPS63183264 U JP S63183264U JP 7240887 U JP7240887 U JP 7240887U JP 7240887 U JP7240887 U JP 7240887U JP S63183264 U JPS63183264 U JP S63183264U
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- utility
- model registration
- oscillation type
- thickness sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7240887U JPS63183264U (en]) | 1987-05-15 | 1987-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7240887U JPS63183264U (en]) | 1987-05-15 | 1987-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63183264U true JPS63183264U (en]) | 1988-11-25 |
Family
ID=30915829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7240887U Pending JPS63183264U (en]) | 1987-05-15 | 1987-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63183264U (en]) |
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1987
- 1987-05-15 JP JP7240887U patent/JPS63183264U/ja active Pending